STEM in SEM For Medium-Resolution X-Ray Microanalysis

X-ray microanalysis attachment for electron microscope.

Fundamental Constants for Quantitative X-ray Microanalysis.

Quantitative X-ray microanalysis requires the use of many fundamental constants related to the interaction of the electron beam with the sample. The current state of our knowledge of such constants in the particular areas of electron stopping power, X-ray ionization cross-sections, X-ray fluorescence yield, and the electron backscattering yield, is examined. It is found that, in every case, the...

X-Ray microanalysis of stratified specimens

This paper presents a description of the state of the art methodology and software for the application of x-ray microanalysis to thin surface layers and more generally to the characterization of stratified specimens. The sensitivity of the technique to near-surface segregation is demonstrated. Some emphasis is given on the eS(pz) function (the distribution in depth of the primary generated x-ra...

A 200-kV STEM/SEM Produces 1 Å SEM Resolution

Introduction “Second best no more” was the title of an article written by David C. Joy for Nature Materials [1]. The article was for highlighting a breakthrough made by a team formed between Brookhaven National Laboratory (BNL, USA) and Hitachi High Technologies Corporation (HHT, Japan). Sub-angstrom secondary electron (SE) images were obtained on a Hitachi HD-2700, which is a combined scanning...

Theoretical Study of the Spatial Resolution of X-ray Microanalysis in Analytical Electron Microscopy

The spatial resolution of X-ray microanalysis has been investigated by Monte Carlo calculatio~s, including knock-on secondary electron production. The results for AuMa in a lOOOA thin Au film at 100 keV showed an appreciable difference from the ones without knock-out events. Also calculations have been done with the Mott cross-section instead of the screened Rutherford cross-section for elastic...